Charge trapping characterization in the thin oxide...

Surface and Interface Analysis 2002 Vol. 34; Iss. 1

Charge trapping characterization in the thin oxide layer/non-conductive substrate system

J. Liebault, D. Moya-Siesse, J. Bernardini, G. Moya
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Volume:
34
Year:
2002
Language:
english
Pages:
4
DOI:
10.1002/sia.1384
File:
PDF, 142 KB
english, 2002
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