Analysis of the boundaries of ZrO2 and HfO2 thin films by...

Surface and Interface Analysis 2002 Vol. 33; Iss. 7

Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method

Petr Klapetek, Ivan Ohlídal, Daniel Franta, Pavel Pokorný
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Volume:
33
Year:
2002
Language:
english
Pages:
6
DOI:
10.1002/sia.1419
File:
PDF, 229 KB
english, 2002
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