Determining the amount of Si–Si bonding in CVD oxynitrides

Surface and Interface Analysis 2003 Vol. 35; Iss. 2

Determining the amount of Si–Si bonding in CVD oxynitrides

Harland G. Tompkins, Steven Smith, Diana Convey, R. B. Gregory, M. L. Kottke, David Collins
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Volume:
35
Year:
2003
Language:
english
Pages:
5
DOI:
10.1002/sia.1474
File:
PDF, 111 KB
english, 2003
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