Determination of amount of substance for nanometre-thin deposits: consistency between XPS, RBS and XRF quantification
A. I. Martin-Concepción, F. Yubero, J. P. Espinos, J. Garcia-Lopez, S. TougaardVolume:
35
Year:
2003
Language:
english
Pages:
7
DOI:
10.1002/sia.1635
File:
PDF, 292 KB
english, 2003