SIMS investigation of the influence of Ge pre-deposition on...

Surface and Interface Analysis 2004 Vol. 36; Iss. 8

SIMS investigation of the influence of Ge pre-deposition on the interface quality between SiC and Si

J. Pezoldt, Ch. Zgheib, P. Masri, M. Averous, F. M. Morales, R. Kosiba, G. Ecke, P. Weih, O. Ambacher
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Volume:
36
Year:
2004
Language:
english
Pages:
4
DOI:
10.1002/sia.1814
File:
PDF, 106 KB
english, 2004
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