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Application of metal cluster complex ion beam for low damage sputtering
Toshiyuki Fujimoto, Takeshi Mizota, Hidehiko Nonaka, Akira Kurokawa, Shingo IchimuraVolume:
37
Year:
2005
Language:
english
Pages:
3
DOI:
10.1002/sia.1955
File:
PDF, 271 KB
english, 2005