Preferential sputtering observed in Auger electron spectroscopy sputter depth profiling of AlAs/GaAs superlattice using low-energy ions
Y. Mizuhara, T. Bungo, T. Nagatomi, Y. TakaiVolume:
37
Year:
2005
Language:
english
Pages:
5
DOI:
10.1002/sia.2027
File:
PDF, 130 KB
english, 2005