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Radio frequency (r.f.) plasma-deposited polymer films: influence of external plasma parameters as viewed by comprehensive in-situ surface chemical analysis by XAS, XPS and ToF-SIMS
W. E. S. Unger, S. Swaraj, U. Oran, A. LippitzVolume:
38
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/sia.2158
File:
PDF, 135 KB
english, 2006