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Correlation between silicon-nitride film stress and composition: XPS and SIMS analyses
L. Vanzetti, M. Barozzi, D. Giubertoni, C. Kompocholis, A. Bagolini, P. BelluttiVolume:
38
Year:
2006
Language:
english
Pages:
4
DOI:
10.1002/sia.2284
File:
PDF, 103 KB
english, 2006