Angle-resolved XPS study of thin oxides after wet cleaning on Si0.8 Ge0.2 substrates
E. Martinez, A. Abbadie, O. Renault, I. Cayrefourcq, S. Quiais-MarthonVolume:
38
Year:
2006
Language:
english
Pages:
3
DOI:
10.1002/sia.2300
File:
PDF, 102 KB
english, 2006