A comparative study between inductively and capacitively...

A comparative study between inductively and capacitively coupled plasma deposited polystyrene films: chemical and morphological characterizations

Marie Haïdopoulos, Jérome Larrieu, Matthieu Horgnies, Laurent Houssiau, Jean-Jacques Pireaux
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Volume:
38
Year:
2006
Language:
english
Pages:
10
DOI:
10.1002/sia.2388
File:
PDF, 1.03 MB
english, 2006
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