A comparative study between inductively and capacitively coupled plasma deposited polystyrene films: chemical and morphological characterizations
Marie Haïdopoulos, Jérome Larrieu, Matthieu Horgnies, Laurent Houssiau, Jean-Jacques PireauxVolume:
38
Year:
2006
Language:
english
Pages:
10
DOI:
10.1002/sia.2388
File:
PDF, 1.03 MB
english, 2006