Ultra-thin SiO2 on Si VIII. Accuracy of method, linearity...

Surface and Interface Analysis 2007 Vol. 39; Iss. 6

Ultra-thin SiO2 on Si VIII. Accuracy of method, linearity and attenuation lengths for XPS

Kyung Joong Kim, M. P. Seah
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Volume:
39
Year:
2007
Language:
english
Pages:
7
DOI:
10.1002/sia.2544
File:
PDF, 183 KB
english, 2007
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