Spectroscopic investigations of the role of Ge in modifying the Si to SiC conversion process
Jörg Pezoldt, Richard Nader, Charbel Zgheib, Gernot Ecke, Ralph Pieterwas, Thomas Stauden, Thomas Wöhner, Pierre MasriVolume:
40
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/sia.2618
File:
PDF, 164 KB
english, 2008