Reactive deposition of TiNx layers in a DC-magnetron...

Surface and Interface Analysis 2008 Vol. 40; Iss. 3-4

Reactive deposition of TiNx layers in a DC-magnetron discharge

Stefan Wrehde, Marion Quaas, Robert Bogdanowicz, Hartmut Steffen, Harm Wulff, Rainer Hippler
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Volume:
40
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/sia.2781
File:
PDF, 250 KB
english, 2008
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