Stitching interferometric metrology for steeply curved...

Surface and Interface Analysis 2008 Vol. 40; Iss. 6-7

Stitching interferometric metrology for steeply curved x-ray mirrors

Hirokatsu Yumoto, Hidekazu Mimura, Takashi Kimura, Soichiro Handa, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi
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Volume:
40
Year:
2008
Language:
english
Pages:
5
DOI:
10.1002/sia.2807
File:
PDF, 429 KB
english, 2008
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