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Highly accurate differential deposition for X-ray reflective optics
Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Takashi Kimura, Satoshi Matsuyama, Yasuhisa Sano, Kazuto YamauchiVolume:
40
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/sia.2812
File:
PDF, 323 KB
english, 2008