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Heteroepitaxial growth of cubic SiC on Si using very-high-frequency plasma at atmospheric pressure
Hiroaki Kakiuchi, Hiromasa Ohmi, Masatoshi Aketa, Ryota Nakamura, Kiyoshi YasutakeVolume:
40
Year:
2008
Language:
english
Pages:
5
DOI:
10.1002/sia.2814
File:
PDF, 203 KB
english, 2008