Interface properties and effective work function of...

Surface and Interface Analysis 2008 Vol. 40; Iss. 6-7

Interface properties and effective work function of Sb-predoped fully silicided NiSi gate

Takuji Hosoi, Kosuke Sano, Akio Ohta, Katsunori Makihara, Hirotaka Kaku, Seiichi Miyazaki, Kentaro Shibahara
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Volume:
40
Year:
2008
Language:
english
Pages:
5
DOI:
10.1002/sia.2827
File:
PDF, 447 KB
english, 2008
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