Surface topography effects on glow discharge depth...

Surface topography effects on glow discharge depth profiling analysis

N. Trigoulet, T. Hashimoto, I. S. Molchan, P. Skeldon, G. E. Thompson, A. Tempez, P. Chapon
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Volume:
42
Year:
2010
Language:
english
Pages:
6
DOI:
10.1002/sia.3165
File:
PDF, 361 KB
english, 2010
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