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Surface topography effects on glow discharge depth profiling analysis
N. Trigoulet, T. Hashimoto, I. S. Molchan, P. Skeldon, G. E. Thompson, A. Tempez, P. ChaponVolume:
42
Year:
2010
Language:
english
Pages:
6
DOI:
10.1002/sia.3165
File:
PDF, 361 KB
english, 2010