Fabrication and characterization of silicon pillars formed by nanosecond pulsed excimer laser in vacuum
A. Djemaa, N. Gabouze, C. Yaddadene, Y. Belaroussi, T. Kerdja, M. Kechouane, H. Menari, A. Y. KhereddineVolume:
42
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/sia.3167
File:
PDF, 289 KB
english, 2010