Influence of active layer thickness and annealing in zinc...

Surface and Interface Analysis 2010 Vol. 42; Iss. 6-7

Influence of active layer thickness and annealing in zinc oxide TFT grown by atomic layer deposition

Cheol Hyoun Ahn, Chang Ho Woo, SooYeon Hwang, Jeong Yong Lee, Hyung Koun Cho, Hyoung Jin Cho, Geun Young Yeom
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Volume:
42
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/sia.3357
File:
PDF, 266 KB
english, 2010
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