Dual beam depth profiling of organic materials: Variations of analysis and sputter beam conditions
D. Rading, R. Moellers, F. Kollmer, W. Paul, E. NiehuisVolume:
43
Year:
2011
Language:
english
Pages:
3
DOI:
10.1002/sia.3422
File:
PDF, 230 KB
english, 2011