Using ellipsometry for the evaluation of surface damage and...

Using ellipsometry for the evaluation of surface damage and sputtering yield in organic films with irradiation of argon cluster ion beams

Masaki Hada, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo
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Volume:
43
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/sia.3452
File:
PDF, 143 KB
english, 2011
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