Titanium layers on aluminum bond pads: Characterisation of...

Titanium layers on aluminum bond pads: Characterisation of thin layers on rough substrates

S. Puchner, A. Zechmann, Th. Detzel, H. Hutter
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Volume:
42
Year:
2010
Language:
english
Pages:
4
DOI:
10.1002/sia.3471
File:
PDF, 176 KB
english, 2010
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