Quantitative depth profiling of SiGe-multilayers with the...

Surface and Interface Analysis 2011 Vol. 43; Iss. 1-2

Quantitative depth profiling of SiGe-multilayers with the Atom Probe

Sebastian Koelling, Matthieu Gilbert, Jozefien Goossens, Andriy Hikavyy, Olivier Richard, Wilfried Vandervorst
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Volume:
43
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/sia.3544
File:
PDF, 237 KB
english, 2011
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