The isotopic comparative method (ICM) for SIMS...

Surface and Interface Analysis 2011 Vol. 43; Iss. 1-2

The isotopic comparative method (ICM) for SIMS quantification of boron in silicon up to 40 at.%

Christiane Dubois, Gilles Prudon, Jean-Claude Dupuy, Brice Gautier, Bruno Canut, Yann Le Gall, Thierry Kociniewski
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Volume:
43
Year:
2011
Language:
english
Pages:
5
DOI:
10.1002/sia.3629
File:
PDF, 321 KB
english, 2011
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