The effect of incident energy on molecular depth profiling...

Surface and Interface Analysis 2011 Vol. 43; Iss. 1-2

The effect of incident energy on molecular depth profiling of polymers with large Ar cluster ion beams

Satoshi Ninomiya, Kazuya Ichiki, Hideaki Yamada, Yoshihiko Nakata, Toshio Seki, Takaaki Aoki, Jiro Matsuo
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Volume:
43
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/sia.3656
File:
PDF, 200 KB
english, 2011
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