SIMS depth profiling of semiconductor interfaces:...

Surface and Interface Analysis 2011 Vol. 43; Iss. 10

SIMS depth profiling of semiconductor interfaces: Experimental study of depth resolution function

Yu. Kudriavtsev, S. Gallardo, O. Koudriavtseva, A. Escobosa, V. M. Sanchez–R, M. Avendaño, R. Asomoza, M. Lopez-Lopez
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Volume:
43
Year:
2011
Language:
english
Pages:
5
DOI:
10.1002/sia.3708
File:
PDF, 373 KB
english, 2011
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