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Mechanical properties of hydrogenated nanocrystalline silicon thin film with different indentation depths
Liqiang Guo, Jianning Ding, Jichang Yang, Guanggui Cheng, Zhiyong LingVolume:
44
Year:
2012
Language:
english
Pages:
5
DOI:
10.1002/sia.3790
File:
PDF, 273 KB
english, 2012