Topography effects and monatomic ion sputtering of...

Topography effects and monatomic ion sputtering of undulating surfaces, particles and large nanoparticles: Sputtering yields, effective sputter rates and topography evolution

M. P. Seah
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Volume:
44
Year:
2012
Language:
english
Pages:
11
DOI:
10.1002/sia.3798
File:
PDF, 597 KB
english, 2012
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