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Matrix effect-free depth profiling of implanted Mg in AlxGa1-xAs/GaAs multi-layers by resonance enhanced multiphoton laser post-ionization sputtered neutral mass spectrometry
Suguru Nishinomiya, Naoyoshi Kubota, Akihiko Sagara, Noriaki Fukumoto, Hiromi Morita, Shunichi HayashiVolume:
44
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/sia.4873
File:
PDF, 526 KB
english, 2012