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Damage profiles of Si (001) surface via Ar cluster beam sputtering
Yong Koo Kyoung, Hyung Ik Lee, Jae Gwan Chung, Sung Heo, Jae Cheol Lee, Young Joon Cho, Hee Jae KangVolume:
aop
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/sia.4917
File:
PDF, 2.30 MB
english, 2012