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A comparative study of SIMS depth profiling of boron in silicon
J. B. Clegg, A. E. Morgan, H. A. M. de Grefte, F. Simondet, A. Huber, G. Blackmore, M. G. Dowsett, D. E. Sykes, C. W. Magee, V. R. DelineVolume:
6
Year:
1984
Language:
english
Pages:
5
DOI:
10.1002/sia.740060403
File:
PDF, 527 KB
english, 1984