RBS and SIMS characterization of tungsten silicide...

Surface and Interface Analysis 1989 Vol. 14; Iss. 1-2

RBS and SIMS characterization of tungsten silicide deposited by using dichlorosilane and tungsten hexafluoride

Richard B. Gregory, Bruce C. Lamartine, T. H. Tom Wu, Harland G. Tompkins
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Volume:
14
Year:
1989
Language:
english
Pages:
5
DOI:
10.1002/sia.740140105
File:
PDF, 478 KB
english, 1989
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