Secondary ion yield matrix effects in SIMS depth profiles of Si/Ge multilayers
Greg Gillen, John M. Phelps, Randall W. Nelson, Peter Williams, Steven M. HuesVolume:
14
Year:
1989
Language:
english
Pages:
10
DOI:
10.1002/sia.740141114
File:
PDF, 932 KB
english, 1989