Investigation of sputter-induced surface composition modification during in-depth profiling of implanted materials by sims, XPS and AES
E. Darque-Ceretti, M. Aucouturier, A. Boutry-ForveilleVolume:
18
Year:
1992
Language:
english
Pages:
11
DOI:
10.1002/sia.740180308
File:
PDF, 894 KB
english, 1992