Measurement of ion sputtering yields for depth profile...

Surface and Interface Analysis 1992 Vol. 18; Iss. 8

Measurement of ion sputtering yields for depth profile analyses

Toshiko Suzuki, Kichinosuke Hirokawa, Yasuo Fukuda, Ken-ichi Suzuki, Satoshi Hashimoto, Noriaki Usuki, Norio Gennai, Shizuo Yoshida, Mitsuru Koda, Hiroshi Sezaki, Akira Horie, Akihiro Tanaka, Takashi
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Volume:
18
Year:
1992
Language:
english
Pages:
7
DOI:
10.1002/sia.740180805
File:
PDF, 765 KB
english, 1992
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