Reactions of Au or Cr evaporated on Si wafers measured by...

Reactions of Au or Cr evaporated on Si wafers measured by the refracted x-ray fluorescence method

T. Shoji, K. Hirokawa
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Volume:
18
Year:
1992
Language:
english
Pages:
4
DOI:
10.1002/sia.740181106
File:
PDF, 285 KB
english, 1992
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