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Interlaboratory comparison of the depth resolution in sputter depth profiling of Ni/Cr multilayers with and without sample rotation using AES, XPS, and SIMS
S. Hofmann, A. Zalar, E.-H. Cirlin, J. J. Vajo, H. J. Mathieu, P. PanjanVolume:
20
Year:
1993
Language:
english
Pages:
6
DOI:
10.1002/sia.740200803
File:
PDF, 534 KB
english, 1993