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Secondary ion mass spectrometry round-robin study of impurity analysis in gallium arsenide using uniformly-doped standard gallium arsenide specimens
Hiroyasu Shichi, Tomoya Ogawa, Satoru Kurosawa, Yoshikazu Homma, Yoshikane Kubota, Yasushi Nakamura, Koichi Nomura, Masahiro Shibata, Junichi Takahashi, Yoshiaki Yoshioka, Tatsuya Adachi, Toshio Akai,Volume:
21
Year:
1994
Language:
english
Pages:
9
DOI:
10.1002/sia.740210104
File:
PDF, 716 KB
english, 1994