Fluorine-Induced corrosion of aluminium microchip bond...

Surface and Interface Analysis 1994 Vol. 21; Iss. 10

Fluorine-Induced corrosion of aluminium microchip bond pads: An XPS and AES analysis

K.-H. Ernst, D. Grman, R. Hauert, E. Holländer
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Volume:
21
Year:
1994
Language:
english
Pages:
6
DOI:
10.1002/sia.740211003
File:
PDF, 538 KB
english, 1994
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