Void formation at silicon nitride/silicon interfaces...

Surface and Interface Analysis 1994 Vol. 21; Iss. 12

Void formation at silicon nitride/silicon interfaces studied by variable-energy positrons

Andrzej Halec, Peter J. Schultz, Marcel Boudreau, Mohamed Boumerzoug, Peter Mascher, John P. McCaffrey, T. E. Jackman
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Volume:
21
Year:
1994
Language:
english
Pages:
7
DOI:
10.1002/sia.740211204
File:
PDF, 1.22 MB
english, 1994
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