Applications of focused ion beams in microelectronics...

Surface and Interface Analysis 1995 Vol. 23; Iss. 2

Applications of focused ion beams in microelectronics production, design and development

F. A. Stevie, T. C. Shane, P. M. Kahora, R. Hull, D. Bahnck, V. C. Kannan, E. David
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Volume:
23
Year:
1995
Language:
english
Pages:
8
DOI:
10.1002/sia.740230204
File:
PDF, 1007 KB
english, 1995
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