![](/img/cover-not-exists.png)
Comparative film thickness determination by atomic force microscopy and ellipsometry for ultrathin polymer films
T. Gesang, D. Fanter, R. Höper, W. Possart, O.-D. HennemannVolume:
23
Year:
1995
Language:
english
Pages:
12
DOI:
10.1002/sia.740231202
File:
PDF, 1.27 MB
english, 1995