A Chemically Amplified Fullerene-Derivative Molecular Electron-Beam Resist
Francis Gibbons, Hasnah M. Zaid, Mayandithevar Manickam, Jon A. Preece, Richard E. Palmer, Alex P. G. RobinsonVolume:
3
Year:
2007
Language:
english
Pages:
5
DOI:
10.1002/smll.200700324
File:
PDF, 412 KB
english, 2007