![](/img/cover-not-exists.png)
Investigation of Reactive HPPMS Process and Influence of Bias Voltage during Deposition of Alumina Coatings
Bobzin, Kirsten, Brögelmann, Tobias, Brugnara, Ricardo H., Basturk, Serhan, Bagcivan, NazlimVolume:
18
Language:
english
Journal:
Advanced Engineering Materials
DOI:
10.1002/adem.201500417
Date:
April, 2016
File:
PDF, 944 KB
english, 2016