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ChemInform Abstract: Preparation of Germanium Nitride Films by Low Pressure Chemical Vapor Deposition
YOUNG, A. B., ROSENBERG, J. J., SZENDRO, I.Volume:
19
Journal:
ChemInform
DOI:
10.1002/chin.198809395
Date:
March, 1988
File:
PDF, 132 KB
1988