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Template-polymer commensurability and directed self-assembly block copolymer lithography
Sunday, Daniel F., Ashley, Elizabeth, Wan, Lei, Patel, Kanaiyalal C., Ruiz, Ricardo, Kline, R. JosephVolume:
53
Language:
english
Journal:
Journal of Polymer Science Part B: Polymer Physics
DOI:
10.1002/polb.23675
Date:
April, 2015
File:
PDF, 675 KB
english, 2015