Low-Pressure Plasma After-Treatment of Pollutants Emitted...

Plasma Processes and Polymers 2015 / 06 Vol. 12; Iss. 6

Low-Pressure Plasma After-Treatment of Pollutants Emitted During Semiconductor Manufacturing

Hur, Min, Lee, Jae Ok, Kang, Woo Seok, Song, Young-Hoon
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Volume:
12
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201500046
Date:
June, 2015
File:
PDF, 4.04 MB
english, 2015
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