Electrical characterization of liquid-phase-deposited SiON...

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phys stat sol (a) 2013 / 05

Electrical characterization of liquid-phase-deposited SiON on (NH 4 ) 2 S-treated GaAs

Yen, Chih-Feng, Lee, Jung-Chan, Cheng, Chi-Hsuan, Lee, Ming-Kwei
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Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201228592
Date:
May, 2013
File:
PDF, 410 KB
english, 2013
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